Numerical Simulation of thermal and microdefect distributions during the Czochralski Si-Crystal Growth
碩士 === 國立中央大學 === 機械工程研究所 === 92 === To clear the characteristics of the Czochralski (Cz) furnace for the single-crystal growth of silicon, a set of global analyses of momentum, heat and mass transfer in small Cz furnaces is carried out using the finite-element method. Consider the global system to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32204214799386084375 |