Investigation of the Three-dimensional Long-Stretch Micro Drive by Metal-based Surface Micromachining
碩士 === 國立交通大學 === 機械工程系所 === 92 === Although much work has been devoted to develop the microactuator or microstructure, few researches have been done on three-dimensional microactuators. Here a lifted micoractuator is designed by integrating an electro-thermal long stretch micro drive (LSMD) and me...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wq38qa |