Studies of hexagonal hillocks on AlxGa1-xN thin film
碩士 === 國立交通大學 === 電子物理系所 === 92 === In this article, we analyzed AlxGa1-xN epilayer which was grown by MOCVD system, with the aid of the micro-photoluminescence (μ-PL) and micro-Raman (μ-Raman) systems. Under the microscopy, we observed several types of hexagonal hillocks on the epilayer. They looke...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63m2v2 |