Study on High-Mobility Low-Temperature Polycrystalline Silicon and Silicon-Germanium Thin Film Transistors Fabricated by Excimer Laser Crystallization
博士 === 國立交通大學 === 電子工程系所 === 92 === In this thesis, based on the excimer laser crystallization (ELC) technique, the influences of laser crystallization parameters on the electrical characteristics and uniformity of the low-temperature polycrystalline silicon thin film transistors (LTPS TFTs) have be...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/fhpk76 |