Design and Fabrication of Suspended Membranes for Microbolometer Applications
碩士 === 國立交通大學 === 電子工程系所 === 92 === Infra-Red sensors are promising components in the field of MEMS. The technologies in MEMS can be divided into bulk micromaching and surface micromaching. Among them, surface micromaching is easier to be integrated and more compatible with integrated circuits(IC)....
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/s2mcm5 |