Communication Interface Design for Cluster Tools with Generic Equipment Model
碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程學程 === 92 === In this thesis, communication interface software confirming to SEMI standard E30 - Generic Equipment Model (GEM) is developed. The developed interface is responsible for the communication between Host computer and Cluster Tool Controller (CTC). The m...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/6tmtw6 |