Geometrical Effects of the Ring Duct on the Uniformity of Thin —film Deposition in a 8〞-PECVD Chamber
碩士 === 國立交通大學 === 精密與自動化工程學程碩士班 === 92 === ABSTRACT In this study is presented the Geometrical Effects of the Ring Duct on the Uniformity of Thin —film Deposition in a 8〞-PECVD Chamber, we used the skewed slots of ring duct to produce swirl to bring gas flow, and improving uniformity of t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00732827096102892254 |