Studies of electrical and optical characteristics of DLC MIS structure
碩士 === 國立成功大學 === 光電科學與工程研究所 === 92 === The amount of leakage current has been judged whether the dielectric material was suit for isolated layer of metal-isolator-semiconductor (MIS) or not for a long time. In the thesis, we used diamond-like carbon film (DLC) as the gate dielectric of MIS device....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83176963940169503089 |