| Summary: | 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 92 === Abstract
The purpose of this research is to examine the influence of excimer laser illumination on micromachining. Here are three different kinds of condition that influence light distribution. First, the incline of work piece and the laser beam indicates that the ablation rate decreases with the increase of incident angle for various influences. Beside, the depth of a hole in the samples oblique to the laser beam at a distance from the focal plane decreases with the increase of the distance from the focal plane. Second, to increase the lens on the path of rays will change the light projection area. According to the situation, the change of energy density causes the change of ablation rate. In this case, it will present the experimental and simulation results. The theory of the model can divide into two steps. In the beginning, the local distribution of the light over the developing structure is evaluated for each pulse by using Fourier optics. Then, the local distribution is used to calculate the local etch rate, and hence the change to structure. Finally, the defocus of the laser beam changes the local light distribution. When the degree of the defocus increases, the beam’s intensity becomes not uniform. The result of simulation shows that the defocus increases, then the structure becomes U-grooves.
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