Influence of Excimer laser illumination on micromachining
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 92 === Abstract The purpose of this research is to examine the influence of excimer laser illumination on micromachining. Here are three different kinds of condition that influence light distribution. First, the incline of work piece and the laser beam indicates...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99081037468089230066 |