| Summary: | 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 92 === This paper use the principle of“Shape from Focus”to develop one system that can automatic measure the profile of sample and build up the focus image at the some time. By continuous moving the stage, pick and fetch the continuous image, then find out the images that the degree of focus is highest, get the distance between the position of focus images and the reference plane. Extend this idea from points to all the surface,we can set up the three-dimensional profile of the sample. After gatting focus information, we can set up the whole focus image.
Our system is very convenient for three-dimension measure, it can solve the problem that the microscope is often unable get the whole focus image. And our system has high accuracy in measuring profile by Appling the advantage of full-field、untouchable and real-time. If we used the system to measure the full-field profile of the sample, the efficiency of the work and the accuracy of analysing will be increase.
Our research proposed the revising type of focus measure to estimate the degree of focus, named〝Enhanced-Sum-Modified-Laplacian （ESML）〞. we increase the positive and negative 45°direction determining to the ESML rule, and it is more sensitivity to differentiate the focus images than the traditional SML rule. The accuracy of the system is increasingly.
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