Optimization of Material Microstructure Study for Thin-Film Inductors
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 92 === Abstract In this study, we first discuss the evolution of Cu and Co thin film microstructure as function of sputter parameters, including substrate-to-target (DT-Sub) distance, working pressure and negative substrate bias. Subsequently, the Cu and Co thin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77626492914502483210 |