A study on Implementation of Expert System for FMCS -- example as Air Abatement System
碩士 === 國立成功大學 === 工學院工程管理專班 === 92 === Technological advancement and highly intensive capital investment within the semi-conductor industries in the past decade have meant that productivity, yield, process safety, and diagnosis of equipment failures in the process are very important. Among these f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50607687538903648481 |