Synthesis and Characterization of Metal-doped Amorphous Carbon Films Deposited by a Cathodic Arc Activated Deposition Process

• Main Authors: Yin-Yu Chang, 張銀佑
• Other Authors: Da-Yung Wang
• Format: Others
• Language: en_US
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/69369145774616095311

博士 === 國立中興大學 === 材料工程學研究所 === 92 === Diamond-like Carbon (DLC) films containing various metal doping were synthesized by using a cathodic-arc activated deposition (CAAD) process. Metal plasma with intensive ion energies catalyzes the decomposition of hydrocarbon gases (C2H2), and induces the formation of hydrogenated amorphous carbon films with a mixture of sp2 and sp3 carbon bonds. The composite film structure consists of a metal- doped amorphous carbon film on top of a graded metal nitride interlayer, which provides enhanced mechanical and tribological properties. In this study, the plasma characteristics of the CAAD process for the deposition of metal-doped a-C:H was investigated by Langmuir probe measurement and optical emission spectroscopy. The catalysis effect of three common transition metal plasmas, including Cr, Ti, and Zr was investigated. This experiment depicts the advantage of the catalysis effect of Cr plasma in synthesizing DLC films with a higher sp3 carbon bond ratio comparing with that of Ti and Zr plasma. The wear properties were correlated with the metal doping determined by atomic size and electronic configuration. A catalytic ability ranking of transition metals for the deposition of metal-doped amorphous carbon films was suggested. Nitrogen was also introduced to form nitrogen-containing Cr-C:H/N films, which contained a mixture of sp2 and sp3 carbon bonds. The mechanical properties were correlated with the nitrogen doping. When nitrogen atoms occupy the substitutional sites to a large percentage, a donor energy level would be created and induces an increasing electrical conductivity.