Synthesis and Characterization of Metal-doped Amorphous Carbon Films Deposited by a Cathodic Arc Activated Deposition Process
博士 === 國立中興大學 === 材料工程學研究所 === 92 === Diamond-like Carbon (DLC) films containing various metal doping were synthesized by using a cathodic-arc activated deposition (CAAD) process. Metal plasma with intensive ion energies catalyzes the decomposition of hydrocarbon gases (C2H2), and induce...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69369145774616095311 |