| Summary: | 碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 92 === The purpose of this thesis is to design, analyze, fabricate and test a micro reluctance motor (µRM) integrated with eddy current sensors. The thick film process and micro electroplating are utilized to combine the µRM stator and eddy current sensors into the same fabrication processes so the motor can be made with miniature size and high precision.
The µRM is designed and analyzed using the finite element software for optimal output performance. The rotor, stator, sensor and bearing are fabricated by the thick film process and micro electroplating. The 4-phase motor has a 6-pole rotor and 8-pole stator. The overall size has an outer diameter of 5mm and thickness of 2mm. The embedded eddy current sensor has a total of 7 turns with a line width of 13µm, line space of 13µm, thickness of 10µm, and footprint of approximately 500µm×500µm. The sensors can be used to detect the position and rotational speed of the motor.
A semiconductor compatible manufacturing process is proposed in this thesis so the µRM can be successfully fabricated, assembled and tested. The motor achieves a maximum speed of 750 rpm with an open loop controller under an exciting frequency of 300 Hz.
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