Study of electric and optical properties of transparent conducting thin films ITO by hydrogen and nitrogen heat treatment
碩士 === 崑山科技大學 === 機械工程研究所 === 92 === The effect of heat treatment in various hydrogen flows on the electrical and optical properties of indium tin oxide (ITO) films has been investigated. The ITO films were heat treatment in hydrogen or mixd hydrogen and nitrogen .The chamber of heat treatment was e...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5kepmw |