| Summary: | 碩士 === 義守大學 === 材料科學與工程學系 === 92 === In this study, the carbon nanotubes / polymer composite were synthesized on Fe — deposited Si wafer by chemical vapor deposition. The Fe films were deposited at ambient temperature for 15s by DC sputtering. The acetylene (C2H2) gas was introduced into the quartz tube at flow rate of 30 ~ 70 sccm at the carbon source. The carbon nanotubes were growth at 750 ℃ for 30 min. After the carbon nanotubes was growthed, the polymer surrounding of the carbon nanotubes by low temperature(200 ℃) polymerization at the same reaction tube . Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) was used to observe the microstructure of the carbon nanotubes and the carbon nanotube / polymer composite. In DSC analysis, the melting point of the nanotubes / polymer material was (104 ℃) similar to that the pure polyethylene (105 ℃).
During the growth of the carbon nanotubes on lager size Si wafer (3x3 cm2),
the silicon carbide layer formed in the middle of the carbon nanotubes film. The inorganic materials(nanotube) can assembled with the organic materials(pure PE) by low temperature polymerization.
In order to promote the growth of the vertically aligned carbon nanotubes were on Si substrate, the patterned Fe films with the aspect ratio lower than 3 were used.
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