Magnesium Fluoride evaporation in ion assisted deposition with End-Hall type ion source
碩士 === 輔仁大學 === 物理學系 === 92 === Abstract Magnesium Fluoride evaporation in ion assisted deposition with End-Hall type ion source Chen Chin Hsien The optical properties of evaporated magnesium fluoride films were not satisfied with usage in optical coating. A lot...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24753196329067649169 |
| Summary: | 碩士 === 輔仁大學 === 物理學系 === 92 === Abstract
Magnesium Fluoride evaporation in ion assisted deposition with End-Hall type ion source
Chen Chin Hsien
The optical properties of evaporated magnesium fluoride films were not satisfied with usage in optical coating. A lot of papers have been published for improving the optical properties of evaporated magnesium fluoride film. So, in this paper, the parameters of ion source in IAD for evaporation of magnesium fluoride films are studied.
The ion current densities were controlled by the various parameters ion source and varied from 0 to 65 μA/cm2 measured with Faraday cup. And, the optical properties of evaporated magnesium fluoride films were determined at 400nm wavelength.
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