Characterization and Growth of Carbon Nanotube from Nickel Catalyst by MPCVD
碩士 === 逢甲大學 === 電子工程所 === 92 === We fabricate the well-order anodized aluminum oxide ( AAO )template on Si substrate using microwave plasma enhanced chemical vapor deposition ( MPECVD ) with complex gas to grow the aligned and ordered carbon nanotube . First, we use aluminum foil on Si substra...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/75653075586714771657 |