Characterization and Growth of Carbon Nanotube from Nickel Catalyst by MPCVD

• Main Authors: Chih-Jung Chen, 陳志榮
• Other Authors: Jen-Bin Shi
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/75653075586714771657

碩士 === 逢甲大學 === 電子工程所 === 92 === We fabricate the well-order anodized aluminum oxide ( AAO )template on Si substrate using microwave plasma enhanced chemical vapor deposition ( MPECVD ) with complex gas to grow the aligned and ordered carbon nanotube . First, we use aluminum foil on Si substrate to fabricate the periodic ordered nanopores template using two anodic oxidation methods. The pore array of the film has a uniform, closely packed honeycomb structure approximately from 50 to 100 nm in diameter and from 600 to 800 nm thick. Second the Ni catalytic was electrodeposited in highly ordered nanochannel of an alumina template by AC volts and room temperature.Finally we can get the ordered carbon nanotube arrays by taking this sample in MPECVD for few minutes.