| Summary: | 碩士 === 中原大學 === 電機工程研究所 === 92 === The purpose of this thesis is to apply fuzzy controllers (FC) to the system of variable speed blowers with inverter devices to improve its duct pressure performance. And, if one of the blowers experiences problems the controller can adjust the other blowers to quickly compensate for it.
Semiconductor factories use many blowers, for example, positive air input for a clean room and exhaust output for a production line. The former directly affect production quality due to the ability to control particle contamination. The latter directly affects <a href="http://www.ntsearch.com/search.php?q=safety&v=56">safety</a> due to its ability to vent harmful organic or combustible gases.
Presently, most factories use PID controllers for blower systems. The parameters of the controllers are usually manually adjusted by engineers, so there is no optimal real <a href="http://www.ntsearch.com/search.php?q=time&v=56">time</a> response. Because the PID response is too slow, this causes the factories to install additional blowers to reduce the risk of blower shutdown.
Supplier air blowers are the main issue of the experiment. First, after the measurement of duct pressure and data collection, the least square method was used for parameter identification to determine the blower system model. Second, a genetic algorithm (GA) was used to <a href="http://www.ntsearch.com/search.php?q=search&v=56">search</a> for the optimal controller parameters. Third, the closed-loop experimental responses were obtained to verify the performance of the FC.
The experimental results show that the use of FC in variable speed blower systems can greatly reduce the rise <a href="http://www.ntsearch.com/search.php?q=time&v=56">time</a> of the pressure response of the blowers and the systems performance is also improved.
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