A simulation for geometric shape of aspheric micro lens by the dragging process
碩士 === 正修科技大學 === 機電工程研究所 === 92 === In this thesis, the computer simulation of micro lens which is manufactured by using the excimer laser in dragging process is examined. The shape and symmetry of single micro lens is discussed. The excimer laser with mask projection machinin...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80930317041866328217 |
| Summary: | 碩士 === 正修科技大學 === 機電工程研究所 === 92 === In this thesis, the computer simulation of micro lens which is manufactured by using the excimer laser in dragging process is examined. The shape and symmetry of single micro lens is discussed.
The excimer laser with mask projection machining has been successfully applied for the fabrication of 2.5D micro parts. Furthermore, the workpiece dragging machining is capable of manufacturing microstructure array with curved surface by using various shape of mask. The scanning or dragging type machining is applied. That is; the worpiece is moving relative to the laser beam during the machining. The mask with half circle or other shape is used. Finally, the shape of the micro lens is compared with the various shape of mask.
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