On Nano- Indentation of Thin Films for Wafers with Interconnect in Deep Submicron:An Experimental and Theoretical Study
碩士 === 國立中正大學 === 機械系 === 92 === The mechanical property at nano-scale is central for the development of nanoscience and technology. Over the years, nanoindentation has evolved into a powerful means of determine the mechanical properties of thin films and surfaces in nanometer regimes. Up...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93417191612393474869 |