以奈米壓痕技術探討硬脆材料之加工變質層微觀特性研究
碩士 === 國防大學中正理工學院 === 兵器系統工程研究所 === 92 === Silicon is now widely used for fabricating various electronics and optics devices due to its excellent physical and mechanical properties. However, Si is an extremely brittle and easily damaged material, it is inevitable to induce sub-surface damage, such a...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75332987315769762997 |