| Summary: | 碩士 === 元智大學 === 電機工程學系 === 91 === Most of the magneto-optical disk drives use optical reading/writing record methods, which make record read 50nm/write 200nm optical spot. The optical diffraction limit and the basic substrate-incidence recording technique, all have restriction on the using of high numerical aperture objective lens unless they use near-field recording. Traditional optical pick-up head is replaced by flying head combined with solid immersion lens in the last optical near-field researches. We studied the near-field optics and the fundamentals of optical waveguide device to achieve waveguide hybrid advanced MEMS (WHAM) by using photo lithographic method. Use the MEMS technical method to fabricate WHAM can make the module small size and light weight, so as it could be put in flying head to fly near the disk to achieve near-field recording. Once the WHAM module can be combined with GMR head to realize optical hybrid recording method, data storage density could be well increased.
In this thesis, we aimed to analyze optical waveguide theory and solve the fixed eigenvalue equation of our desired WHAM module. We do the simulation of the optical characteristics in WHAM module by used optical design softwares ‘ZEMAX’ and ‘BPM-CAD’ before fabrication by using of photo lithographic technique. Finally we measure all the characteristics completely of the WHAM module, its precision experimental setup was designed ourselves. From experimental result, our WHAM module really produces good focus and convergence.
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