Development of Micro-Array Release Sensors

• Main Authors: I-Fen Hsieh, 謝伊芬
• Other Authors: Yet-Pole I
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/77386651941848578097

碩士 === 國立雲林科技大學 === 環境與安全工程系碩士班 === 91 === Many semiconductor making-processes employ several highly hazardous gases with poisonous, inflammable and explosive characteristics, such as arsine, phosphine and silane, etc. They will cause serious impacts on employees, equipments or environment, once these gases escape while processing. All the gas detectors serviced in the factories for the time being possess their own limitations. Lack of selectivity, frequent false alarms and high cost are most obvious. Owing to the tremendous market requirement in Taiwan and Mainland China in the near future, it is necessary to develop a new generation semiconductor gas detector. A novel gas release detector has been used in semiconductor making-process. The theory of the detection is by using a sensible film immobilized on the surface of a quartz crystal. The detection of the target gas can be realized by utilizing the highly specific bonding force between the target gas and the sensible material immobilized on the crystal surface, with the linear relationship between the resonance frequency response and the weight variation on the surface. The study applied semiconductor processes technology (ie: photolithography, evaporation, and lift-off) to fabricate multi-channel quartz crystal, in order to detect various substances simultaneously. According to Sauerbrey Equation, to reduce the electrode of quartz crystal will increase sensitivity of detection. Thus, the electrode is reduced to diameter 2.5 mm in the preliminary study to differentiate present-used electrode of diameter 4.5 mm used in QCM. The study results show the former processed detection of CO2, the signal increase as double as the latter. The results show the signal will become stronger when the electrode reduces The initial study stage of gas release detector was used in semiconductor process in order to prove the feasibility of developed detector. We directly use the best detector effect of recognizing material (THEED) to detect and to analysis CO2. The results show the quartz crystal made and developed by us is much stronger on message than usual electrode. However, the study shows that the energy caused by channels resonance counter-balances when crystal quartz’s back was all evaporated