Development and Fabrication of Glucose Micro-Biosensor

• Main Authors: Chun-Ho Chen, 陳俊合
• Other Authors: none
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/66905002390750043947

碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 91 === In this research, we have applied for Semiconductor and MEMS technologies in micromachined glucose sensor. In our fabrication process, the anisotropic etching of silicon, thin photoresist of SHIPLEY and Lift-off fabrication technology are used. In the KOH etching process, we can found that the etching rate differs for the different KOH solution at the same temperature. Moreover, the optimum etching ratio has found in 2 M/ KOH solution at 66℃. In exposed Fabrication, the experiment conditions are published that the photoresist of SHIPLEY STR-1075, STR-1045 and STR-3012 with different rotational speed of spin-coating. Finally, we had a discussion on the electrochemistry analysis of silver micro-plane electrode.