Development and Fabrication of Glucose Micro-Biosensor
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 91 === In this research, we have applied for Semiconductor and MEMS technologies in micromachined glucose sensor. In our fabrication process, the anisotropic etching of silicon, thin photoresist of SHIPLEY and Lift-off fabrication technology are used. In the KOH...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66905002390750043947 |