The Study of GaN Epitaxy Layers Grown by MOCVD System and AlGaAs/GaAs HBT
碩士 === 南台科技大學 === 電機工程系 === 91 === In this thesis, We successfully grew un-doped GaN bulk epitaxy layer on sappgire by home-made Metal-Organic Chemical Vapor Deposition (MOCVD) system. besides, we discussed the nitridation time and the flow rate of hydrogen in an un-doped GaN epitaxy laye...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22640901042996318673 |