Studuy on low temperature field assisted aluminum induced crystallization of amorphous silicon film
碩士 === 南台科技大學 === 電機工程系 === 91 === In this thesis, Aluminum Induced Crystallization (AIC) method was employed to crystallizeα-Si films for low temperature Poly-Si (LTPS) application.α-Si/Al/Glass structures with various thickness ratios were prepared using PECVD and RF magnetron sputter forα-Si and...
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| Format: | Others |
| Language: | zh-TW |
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2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05314582700060393243 |