EWMA Controller Based on Stopping Time and its Applocations
碩士 === 南台科技大學 === 工業管理研究所 === 91 === The “predictor-corrector” feedback controller, a process adjustment scheme proposed for semiconductor manufacturing run-to-run processes that drift, is extended to the random stopping case in the number of sampling. The controller is based on single and double ex...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
|
Online Access: | http://ndltd.ncl.edu.tw/handle/42149950573839637284 |