EWMA Controller Based on Stopping Time and its Applocations

碩士 === 南台科技大學 === 工業管理研究所 === 91 === The “predictor-corrector” feedback controller, a process adjustment scheme proposed for semiconductor manufacturing run-to-run processes that drift, is extended to the random stopping case in the number of sampling. The controller is based on single and double ex...

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Bibliographic Details
Main Authors: ShuShin Wang, 王樹欣
Other Authors: Ju, Da-jung
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/42149950573839637284