Research and Development of Dynamic Mask Technology and Its Application on 3D Micro-Device Fabrication

• Main Authors: Shen Chang-Ho, 沈昌和
• Other Authors: Jeng Jeng-Ywan
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/70644615618145183256

碩士 === 國立臺灣科技大學 === 機械工程系 === 91 === The aim of this research is to develop the dynamic mask technology and to apply this technology to micro-device fabrication or 3D Part fabrication. As the result, a prototype system has been developed. In MEMS process, if wanted to fabricate 3D part or device, it needs a lot piece of different masks. In this research, a new kind of dynamic mask has been used into MEMS process to instead of a suit of traditional masks. It can improve the problems of traditional ones, for example, that have longer loading time、loading position accuracy and cost problems. Another research is using this dynamic mask in rapid prototyping system. And to develop the prototyping system that based on fine optical design、steady mechanism design and system automation. Hence the accuracy of complex 3D part fabrication and reliability of system can be expected.