Mechanical Properties of MEMS Thin Films
碩士 === 國立臺灣大學 === 應用力學研究所 === 91 === This dissertation starts with mechanics of materials and basic theorem of electromagnetics and tries to design several kinds of test keys. With the combination of test keys and optical measurement system which can construct a complete measuring process. This proc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92968253381818118110 |