The study of the manufacture of the bimorph beam structure of single crystal silicon
碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === The main purpose of this thesis is to develop a bimorph beam structure which can be used in the manufacture of micro accelerometer. In the design of structure, the axial stress within the beam will be reduced by the direction of the beam su...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94874256975683690440 |