Application of Scanning Probe Microscope for Nano Manipulation
碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === This research addresses the servo issue in the SPM lithography. SPM is one of the few instruments available nowadays to probe into the fantastic nano world. People have demonstrated the ability to move nano particles around and to scrape the test piece with nano...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24602768933631444422 |