Preparation and Characterization of Sputtered Copper Films Containing Tungsten Carbide
碩士 === 國立海洋大學 === 材料工程研究所 === 91 === Since Cu and WC are both mutually immiscible, copper films containing tungsten carbide is likely to be a noble material for applications. In this study, Cu-WCx films are prepared by R.F. magnetron sputter deposition technique. With careful control of processing c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76227939914906592272 |