On the Design and Research of A Temperature Gradient Driven Micro Droplet Actuator

• Main Authors: Yuan-Tai Tseng, 曾元泰
• Other Authors: Ching-Chang Chieng
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/72960569274791462401

碩士 === 國立清華大學 === 工程與系統科學系 === 91 === The work of this research is to developing a temperature gradient driven micro-droplet actuator and studying on the movement of various sized micro-liter droplets. There are many merits to controlling the movement of micro-droplet such as low requirement of liquid mass, precise position controlling and large surface-volume ratio in chemical reaction, etc. Using MEMS fabrication process, a series of distributed microheaters made of Pt/Ti with applied voltage of 30 volts produced temperature gradient up to 60℃/mm. The maximum moving speed of Silicone oil droplet could reach 1mm/s and the behavior of micro-droplet has been recorded by high speed CCD camera .To observing the inner flow structure of micro-droplet, this study used μ-PIV and numerical simulation that based on first principle equations to providing prediction. The results indicate that the differences and the change of dynamic receding/advancing contact angle and temperature gradients across the droplets are the key parameters determining the moving behavior of the micro-droplet.