| Summary: | 碩士 === 國立清華大學 === 動力機械工程學系 === 91 === Traditionally, optical network switches are performed via electron to exchange optical data information. The optical-electrical-optical conversion would lead to slow data transformation. The mature of internet and optical Dense Wavelength Division Multiplexing(DWDM) required and also make possible impressive transmission capacities. The data transmissions per single-mode fiber have been over thousands of gigabits. Thus, it is hard to exchange data information by using electronic-switched networks. To resolve this problem, all-optical switching fabrics are expected to play a key role. This device, in this proposal, allows switching directly in the optical domain, and avoids the need of optical-electrical-optical conversions. In the future, all-optical network frame is expected to be the trend for optical telecommunication networks. Optical switches will be the key devices in all-optical network architectures
Optical switches change the path of optical signals via either BAR or CROSS state. MEMS switches generally use either movable or rotational micro-mirrors to deflect optical signals from input to output fibres. In this paper, We develop a micromechanical optical fiber switch to regulate light beams in free-space by using electrostatic rotary comb drive actuators. The reflective mirror above the actuator is made by depositing an aluminum layer. We will use organic material, polyimide, as the hinge driver. After curing process, the hinge driver generates the surface tension force. For releasing the sacrificial layer below the mirror, the hinge driver raises the micromirror out of plane. In order to ensure that mirror can keep with right vertical angle, we utilize the micro lock-mechanism to fix mirror vertically.
In this paper, we will develop innovative fabrication processes for our optical switches via integrating surface micromachining with ICP-RIE. The modeling and simulation of our optical switch are reported.
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