Enhanced Growth of Low-Resistivity Metal Silicides and Self-Assembled Silicides Quantum Dot Arrays on Epitaxial Si-Ge Alloys on Silicon
博士 === 國立清華大學 === 材料科學工程學系 === 91 === Enhanced growth of low-resistivity metal silicides and self-assembled NiSi and CoSi2 quantum dot arrays on epitaxial Si-Ge alloys have been studied by sheet resistance measurement, glancing incidence X-ray diffractometry (GIXRD), transmission electron...
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| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64571933245719420108 |