Machine Assignment, Order Releasing and Dispatching Policies in Photolithographic Area Under Critical Layer Constraints
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 91 === In semiconductor manufacturing, critical layers of a wafer lot often required to be processed at the same photolithographic machine in order to meet stringent cross-layer registration requirement. Non-critical layers do not have such requirement. I...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/86257572645111955340 |