Thermal and flow analysis of the mass flow controller
碩士 === 國立屏東科技大學 === 機械工程系 === 91 === The purpose of this study is to explore a critical component of the equipment for fabricating the semiconductor, the mass flow controller (MFC). Numerical simulation software (DesignSTAR & Flow) is used to analyze the loss coefficient from the gate valve and...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84537458685184711174 |
| Summary: | 碩士 === 國立屏東科技大學 === 機械工程系 === 91 === The purpose of this study is to explore a critical component of the equipment for fabricating the semiconductor, the mass flow controller (MFC). Numerical simulation software (DesignSTAR & Flow) is used to analyze the loss coefficient from the gate valve and bypass tubes which are important parts of the MFC. Simulation results show that the Re number have an inverse effect with the loss coefficient on fixed valve opening and same ratio of pipe radius.
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