High-Temperature Oxidation Properties of Unbalanced magnetron PVD coating TiAlCN film on High Speed Tool Steel

• Main Authors: Ching-Ying Kuo, 郭鑑瑩
• Other Authors: Tsow-Chang Fu
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/49086311574956280393

碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 91 === Most 3C industry in operation has to meet high precision, high speed and fine dimension demand, the traditional existed cutting tool has it’s limitation . Especially when we processing the P.C. board, the cooling oil is prohibited in order to prevent of creating pollution problem. Therefore cutting tool is easily worn out in this high speed cutting and no cooling oil environment due to temperature increased, which will cost the production cost increase rapidly. In order to meet this requirement, this paper will develop a coated film-TiAlCN which produced by combining two different coated film of TiCN which have high hardness and low friction coefficient, and TiAlN which have high oxidation resistance ability. In this research, we used unbalanced magnetron physical sputtering equipment to sputter TiAlCN coating film on high speed tool steel. We will study the characteristics of TiAlCN coating film to put in use on high temperature process environment. As the result of this experiment, we can found out the oxidation resistance temperature of TiAlCN coating film exhibited onset of 800℃. When the temperature approach 900℃, TiAlCN coating film will not have any protection properties for base material. After that, the base material will oxidation faster, and develop Fe2O3 structure. Beside that, by XRD and EDS analysis, we can found out that because of the carbon element became oxidation easily inside the TiAlCN coating film in the high temperature environment, the hardness and wear resistance will became lower. Until the temperature approach 500℃, it will grown a very thin oxidation film（Al2O3）in the TiAlCN coating film surface. The Al2O3 film has high hardness and high dense structure which coated further avoid oxidation in the inner structure of TiAlCN, and increase the hardness and wear resistance of the TiAlCN in the high temperature environment. Therefore, metastable phase（111）and （200）texture of TiAlCN will transition to （TiN/TiCN/TiAlN/TiAlCN）metastable phase. Finally, we also will discussion the other characteristics such as hardness、adhesive strength、wear resistance and color of the surface of TiAlCN coated film in this paper.