Fabrication and Measurement of Carbon nanotube

• Main Authors: T. M. Yea, 葉騰懋
• Other Authors: J. C. Wu
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/93287217464362216558

碩士 === 國立彰化師範大學 === 物理系 === 91 === Electrical transport measurement of single multi-wall carbon nanotube is the main subject in this study. The main works contain the fabrication of various metal electrodes; the transport characterization at low temperature and in high magnetic field; the electrical transport measurement of free-standing carbon nanotube; and the electrical transport measurement of crossed carbon nanotube junction. The fabrication procedures of single carbon nanotube devices are as follows. First, multi-wall carbon nanotube was dispersed in pure toluene solution. After ultrasonic agitation for many hours, the solution was spun onto a silicon wafer having pre-patterned bonding pads and alignment marks. An atom force microscope was then used to locate the nanotubes diversely distributed on the surface. Finally, a standard electron beam lithography through a lift-off process was used to make interconnects to carbon nanotubes. Various electrodes such as Ti/Au and Au have been successfully made and shown characteristics of Ohmic contacts. The electrical transport measurements at various temperatures down to 1.5K and/or under magnetic field up to 8 Tesla have been characterized on single tube attached on the surface as well as free standing and tubes with crossed junctions.