Manufacture and Analysis of Titanium Dioxide thin film
碩士 === 國立中央大學 === 機械工程研究所 === 91 === Microelectromechanical systems is a new field in the world now,it use micro-technology,system technology,materials and effect technology, manufacture microsensors,signal processor,and microactuators.The research I make is to study "use thermal oxidati...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/43881343917670052695 |