| Summary: | 碩士 === 國立中央大學 === 機械工程研究所 === 91 ===
Microelectromechanical systems is a new field in the world now,it use micro-technology,system technology,materials and effect technology,
manufacture microsensors,signal processor,and microactuators.The research I make is to study
"use thermal oxidation method to form titanium
dioxide and its materials character and analysis"
.The experiment parameters including:temperature,
oxygen flow,pressure.The main parameters are
temperature,oxygen flow ,and pressure affects small.When titanium dioxide thin film is formed,
furthermore,to measure resistivity,measure contact
angle,analyze XRD,analyze FTIR.After resistivity
measurement,if titanium deposit on silicon substrate directly,then resistivity increases when
oxygen flow increases.If titanium deposit on silicon substrate directly,then resistivity increases when temperature increases,but sometimes
has exception when temperature is 600℃,because has formed titanium silicide.If titanium deposit on oxide,compare with titanium deposit on silicon substrate,after oxidation,the former has higher
resistivity.According to contact angle measurement
,if protein can react with titanium dioxide,the protein must be hydrophilic,otherwise,if it is
hydrohobic,it can`t react with titanium dioxide.
After measurement,the PVD method has smaller contact angle than CVD method.It shows PVD method
has better hydrophilic.According to XRD analysis,
when 2Θ=25°,it has anatase(101)peak,when 2Θ=48°,it has anatase(200)peak,when 2Θ=54°,it has anatase(105)peak.Finally,after FTIR analysis,
CVD method has stronger peak than PVD method,when
temperature increase,no matter PVD method or CVD
method,they have stronger peak.
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