The Design、Analysis and Fabrication of Capacitive Accelerometer
碩士 === 國立交通大學 === 電機與控制工程系 === 91 === The aim of this thesis is to design、manufacture a capacitive-type micro-accelerometer. It is different from device made by surface-micromaching and bulk-micromaching. Combining SOI-wafer and ICP-RIE technique, this accelerometer is made by two masks p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47357783537666255125 |