Study On Capacitive Proximity Sensors Using MEMS Technology

• Main Authors: Chih-Ming Yang, 楊志明
• Other Authors: An-Chen Lee
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/13288386559699572380

碩士 === 國立交通大學 === 機械工程系 === 91 === In this thesis, MEMS Technology is used to develop the micro proximity sensors. The sensors are designed to detect the position of objects with different electric properties, which include grounding conductors, floating conductors and dielectric materials. The content of the thesis mainly includes two parts - one discusses analysis and design of the new capacitance sensors to improve the property of the sensors, the other focuses on the fabrication and measurement. For the analysis purpose, the FEM software package - Ansoft Maxwell is used to analyze the electrostatic field distribution surrounding the electrodes and determine the fringe capacitance. Through masks design and process arrangement for Surface Micromaching Technology, several new types of Microsensors, including comb type, ring type, and honeycomb type, are manufactured. An additional concern on sensor packaging for practical applications is also discussed in the thesis. Finally, the measurement platform is set up to measure the fringe capacitance, which will be varying with different positions of target object. The error caused during the measurement is investigated and discussed in the thesis.