The Study and Application of Opto-Electronic Displacement Sensor on Precision Measurement for Machine Tools
碩士 === 國立交通大學 === 機械工程系 === 91 === Upon the demand of higher accuracy requested by precision machining and micro-machining industry from micrometer (μm,10-6m) to nanometer (nm,10-9m). The critical issues of small vibration on the precise machining tools play a very important role. In orde...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/03762941657383780020 |