The Study and Application of Opto-Electronic Displacement Sensor on Precision Measurement for Machine Tools

碩士 === 國立交通大學 === 機械工程系 === 91 === Upon the demand of higher accuracy requested by precision machining and micro-machining industry from micrometer (μm,10-6m) to nanometer (nm,10-9m). The critical issues of small vibration on the precise machining tools play a very important role. In orde...

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Bibliographic Details
Main Authors: Chieh-Ming Hsiung, 熊介銘
Other Authors: Pi-Ying Cheng
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/03762941657383780020