Photoluminescence Study of Hillock on AlGaN Films

碩士 === 國立交通大學 === 電子物理系 === 91 === We have studied the hexagonal-hill defect ( Hillock base : 1 to 10 μm) of AlGaN films in this thesis. Here, Hillocks were characterized by micro-photoluminescence (μ-PL, spot size : ~1.5 μm) and atomic force microscopy (AFM, spatial resolution...

Full description

Bibliographic Details
Main Authors: Wei-Chung Chen, 陳蔚宗
Other Authors: Ming-Chih Lee
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/83462459474521115348